nanotrench
Appearance
English
[edit]Etymology
[edit]Noun
[edit]nanotrench (plural nanotrenches)
- A nanoscale trench
- 2016, Feng Xiong, Sanchit Deshmukh, Sungduk Hong, Yuan Dai, Ashkan Behnam, Feifei Lian, Eric Pop, “SANTA: Self-Aligned Nanotrench Ablation via Joule Heating for Probing Sub-20 nm Devices”, in arXiv[1]:
- Here we describe a lithography-free, self-aligned nanotrench ablation (SANTA) technique to create nanoscale trenches in a polymer like poly(methyl) methacrylate (PMMA).