nanotrenches
English
[edit]Noun
[edit]nanotrenches
- plural of nanotrench
- 2016, Feng Xiong, Sanchit Deshmukh, Sungduk Hong, Yuan Dai, Ashkan Behnam, Feifei Lian, Eric Pop, “SANTA: Self-Aligned Nanotrench Ablation via Joule Heating for Probing Sub-20 nm Devices”, in arXiv[1]:
- We achieve sub-20 nm nanotrenches for the first time, by lowering the ambient temperature and reducing the PMMA thickness.