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octafluorocyclobutane

From Wiktionary, the free dictionary

English

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Etymology

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From octa- +‎ fluoro- +‎ cyclobutane.

Noun

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octafluorocyclobutane (uncountable)

  1. The organofluorine compound C4F8, related to cyclobutane by replacement of all C–H bonds with C–F bonds, and used as a deposition gas and etchant in semiconductor manufacture.

Synonyms

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