subfab
English
[edit]Etymology
[edit]Noun
[edit]subfab (plural subfabs)
- The area underneath a semiconductor fabrication plant
- 2015 September 6, Rachael M. Jones et al., “Exposure Reconstruction and Risk Analysis for Six Semiconductor Workers With Lymphohematopoietic Cancers”, in Journal of Occupational and Environmental Medicine[1], volume 57, :
- Line A involved a 121,000 ft 2 area, with downdraft laminar flow and flow-through ventilation from fab to subfab areas; the facility uses an open bay and chase design, such that SEGs may overlap within process bays or maintenance chases.